Compact and high rigidity! Ultra-small body positioning table.
This product is a positioning table compatible with high vacuum (approximately 1×10-5 Pa). Despite its ultra-compact body that fits in the palm of your hand, it achieves high rigidity by employing cross roller guides in the guidance system and precision ball screws (preloaded) in the transmission system, ensuring stable movement. Additionally, we offer options such as brackets that can be combined in multi-axis configurations like XY and XZ axes. 【Features】 ■ Clean-compatible products are also available ■ Compact & high rigidity ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease is selected based on the customer's application *For more details, please refer to the catalog or feel free to contact us.
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【Main Specifications】 ■Dimensions: W26×L110×H36 [mm] ■Table Size: 25×30 [mm] ■Travel: 10 [mm] ■Load Capacity: 1.5 [kg] ■Maximum Load Moment (Mp): 1.0 [N·m] ■Resolution: 2 [μm] ■Positioning Accuracy: 10 [μm] ■Repeatability: ±5 [μm] ■Yawing, Pitching: 25 [arcsec] *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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