Thin! High vacuum compatible positioning table with a thickness of 25mm.
This product is a positioning table compatible with high vacuum (approximately 1×10^-5 Pa). It can be used in narrow and confined spaces with a minimum thickness of 25 mm for strokes up to 200 mm. Additionally, since our company conducts its own outgassing evaluation, there is minimal impact on other equipment within the chamber when used in a high vacuum environment, allowing us to provide precise specifications for vacuum applications. 【Features】 ■ Equipped with vacuum-compatible stepping motors ■ Equipped with vacuum-compatible photo sensors ■ Ideal for multiple installations, such as side-by-side arrangements *For more details, please refer to the catalog or feel free to contact us.
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basic information
【Main Specifications (Excerpt)】 ■Dimensions: W100×L266×H25[mm] ■Table Size: 100×100[mm] ■Travel: 100[mm] ■Drive: 5-phase stepping motor ■Ball Screw: Φ6mm lead 1mm ■Guide: Linear guide ■Weight: 1.4［kg］ ■Main Material: Aluminum alloy ■Surface Treatment: Special Ni plating ■Load Capacity: 2.0[kg] ■Theoretical Resolution: 2[μm] ■Repeat Positioning Accuracy: 5[μm] ■Lost Motion: 10[μm] ■Straightness (Height Variation): 15[μm] ■Yawing & Pitching: 20[arcsec] *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Our company is committed to 'monozukuri' (manufacturing), nurturing and enhancing our technical capabilities. We utilize this to connect companies with specialized fields and strengths, aiming to create new innovations.