Have you completed the measures against fluorocarbons? 'ThermoRack1201'

Peltier chiller without refrigerant gas, suitable for plasma etching in semiconductor manufacturing processes!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerant gases. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it operates while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

Chiller