Have you completed the measures against fluorocarbons? 'ThermoRack1201'

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with quick temperature response and a temperature stability of ±0.05℃, without using refrigerant gases.
It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots.
It is compatible with products from major etcher manufacturers.
The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity.
For more details, please refer to the related product page or PDF materials below.

Inquiry about this news
Contact Us OnlineMore Details & Registration
Details & Registration