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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Next-generation semiconductor manufacturing plant "Minimal Fab"

Next-generation semiconductor manufacturing plant "Minimal Fab"

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last updated:Feb 15, 2017

横河ソリューションサービス 半導体サービスセンター
横河ソリューションサービス 半導体サービスセンター
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Minimal fabs that bring innovation to semiconductor manufacturing! Semiconductor manufacturing equipment capable of handling everything from research and development to production!

At Yokogawa Solution Service, we have several engineers who have mastered minimal technology and have been stationed at AIST Tsukuba since the inception of the national project "Minimal Fab Technology Research Association." We were also the ones who fully supported the first customer in the world to implement minimal fab. Because of our expertise, we offer not just equipment sales but a total fab solution! In April 2016, we opened the Yokogawa Minimal Application Lab at our Musashino headquarters. Would you like to come and see the future semiconductor factory? *For more details, please request materials or view the PDF data available for download.

    Other semiconductor manufacturing equipment
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Next-generation semiconductor manufacturing plant "Minimal Fab"

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<Only Yokogawa can handle everything from before to after implementation with a single point of contact> Equipment Selection (1) You can rely on Yokogawa for any equipment! We handle everything including estimates, usage, and delivery adjustments. We also welcome visits to our demo room and consultations regarding processes. Equipment Selection (2) We propose the optimal lineup of equipment tailored to your target devices! Whether it's minimal fabs or mega fabs, Yokogawa provides solutions that are well-versed in both. Establishing the Installation Environment (1) We propose optimal utility facilities and floor layouts tailored to the installation environment and operations. Establishing the Equipment Environment (2) We provide consulting on the storage, handling, and safety equipment for hazardous materials and toxic substances, as well as sales and installation of necessary equipment. Startup Yokogawa manages all the preparations for the work, so all you need to do is be present! Operational Support We also provide operational advice and various training for our customers. After-Sales Support Our after-sales service system is robust, available 24/7, 365 days a year! Even if you have many types of equipment, you only need to contact Yokogawa!

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Applications/Examples of results

In April 2016, we opened the Yokogawa Minimal Application Lab at the Yokogawa Electric Musashino headquarters. We invite you to explore the future semiconductor factory! *The use of the lab is by reservation only. For more information, please refer to the catalog.

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Minimal Fab Complete Solution

Minimal Fab Complete Solution

TECHNICAL
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Minimal Comprehensive Catalog / List of Minimal Devices

Minimal Comprehensive Catalog / List of Minimal Devices

CATALOG
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Information about the Yokogawa Minimal Application Lab

Information about the Yokogawa Minimal Application Lab

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Company information

横河ソリューションサービス

横河ソリューションサービス 半導体サービスセンター

Electronic Components and Semiconductors

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Our company is participating in the national project "Minimal Fab Technology Research Association," led by the National Institute of Advanced Industrial Science and Technology (AIST), aimed at realizing next-generation semiconductor manufacturing factories. We provide various solutions for customers, ranging from the purchase of equipment to operation and maintenance, excluding the manufacturing of minimal fab devices. In April 2016, the "Yokogawa Minimal Application Lab," where visitors can experience minimal fab, opened on our headquarters premises in Tokyo. For more details, please refer to the catalog page.

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