An ozone water generation device suitable for precision cleaning applications of parts and components! It is compact yet can produce a large and stable flow of ozone water!
This is an ozone water generation device suitable for precision cleaning applications of parts and components. Despite its compact size, it can produce a large and stable flow of ozone water. 【Features】 ■ Circulation system adopted: Extremely low amounts of stagnant and waste water Rapid concentration buildup (ozone water generated in 1 minute) Stable ozone water concentration and flow during the cleaning process ■ Metal-free ozone water: Generates ozone water suitable for semiconductor cleaning through proprietary technology ■ Compact, lightweight, and no cooling water required: External dimensions 611W × 590D × 1317H, weight approximately 87 kg Equipped with a cooling radiator *For details, please request materials or view the PDF data from the download.
Inquire About This Product
basic information
【Specifications】Excerpt ■ Cooling method: Radiator circulating water cooling system ■ Ozone water concentration measurement: Built-in ultraviolet ozone water concentration meter ■ Power consumption: 1 kW *For more details, please contact us.
Price range
Delivery Time
Applications/Examples of results
It is used in factories such as semiconductor manufacturing. In the field of semiconductor cleaning, a concentration of 20 ppm of ozone water is often used for the removal of organic substances and metals. In the case of the application of semiconductor resist stripping, ozone water with a concentration of 100 ppm or more may be used. *For more details, please contact us.*
catalog（1）
Download All Catalogs
Company information
Building a circular industrial structure is the most important challenge for us, who are responsible for the science and technology of the 21st century. Our company is committed to supporting the development of new technologies to address this challenge. In particular, to enhance the technical foundation of ozone utilization technology, which is regarded as a key technology for this purpose, we will supply low-cost and high-performance ozone generators to the field of ozone utilization. We will also accumulate information on ozone utilization technology and support its dissemination and development in terms of information.