Bulk transfer of 6-inch wafers is possible! A servo press capable of transferring nanometer structures.
The "NM-0403" from Meichang Machinery can accurately transfer nanometer structures and is a servo press capable of batch transferring 6-inch wafers. It is equipped with three types of nanoimprint functions: thermal imprint, room temperature imprint, and optical imprint. As an option, it can be equipped with an aligner function to automate wafer alignment. 【Features】 ■ Flexible condition setting ■ Aligner function ■ Three types of nanoimprint functions - Thermal imprint - Room temperature imprint - Optical imprint *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications】 ■Compatible substrate shapes - Resist substrate: Outer diameter 150mm - Mold: Outer diameter 150mm, stacking thickness up to 6mm ■Outer dimensions (mm): - Main unit: 990W × 1370D × 1810H - Cooling water circulation unit: 354W × 384D × 851H *For more details, please refer to the PDF document or feel free to contact us.
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Our company utilizes the latest mechatronics technology and strives for continuous improvement in quality to meet customer demands and build trust. Additionally, we engage in ongoing environmental conservation activities to promote sustainable business practices in harmony with the global environment and local communities.