Equipped with three types of nanoimprint functions! You can freely set the conditions for temperature and pressure.
The "NM-0501" from Meichang Engineering is a nanoimprint device developed to increase the semiconductor integrated circuit line width to the nano level in a simple and low-cost manner. It is equipped with three types of nanoimprint functions: thermal imprint, room temperature imprint, and optical imprint. The essential conditions of temperature and pressure for imprinting can be freely set. It allows for four consecutive transfers through a step-and-repeat method. 【Features】 ■ Flexible condition settings ■ Equipped with step-and-repeat functionality ■ Three types of nanoimprint functions - Thermal imprint - Room temperature imprint - Optical imprint (optional) *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Equipment Configuration - Main unit (compatible with clean rooms) - Cooling water circulation system ■ Substrate Size - Mold: φ2 inches or less - Sample substrate: φ4 inches or less ■ Substrate Temperature Adjustment Range: 20 to 300℃ ■ Step & Repeat: ±15mm in X.Y direction ■ Pressure Adjustment Range: 0 to 19kN ■ External Dimensions: - Main unit: 1035W × 915D × 1903H - Cooling water circulation system: 340W × 394D × 851H ■ Weight: - Main unit: approximately 850kg - Cooling water circulation system: approximately 40kg ■ Power Supply: - AC200V 50A - 50/60Hz *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Our company utilizes the latest mechatronics technology and strives for continuous improvement in quality to meet customer demands and build trust. Additionally, we engage in ongoing environmental conservation activities to promote sustainable business practices in harmony with the global environment and local communities.
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