Capable of 4 consecutive transfers! A nanoimprinter equipped with three types of nanoimprint functions.
The "NM-0401" from Meichang Machinery is a nanoimprint device developed to increase the semiconductor integrated circuit line width to the nano level in a simple and low-cost manner. It is equipped with three types of nanoimprint functions: thermal imprint, room temperature imprint, and optical imprint. The essential conditions of temperature and pressure for imprinting can be freely set. It is capable of four consecutive transfers using the step-and-repeat method. 【Features】 ■ Flexible condition settings ■ Step-and-repeat function ■ Three types of nanoimprint functions - Thermal imprint - Room temperature imprint - Optical imprint *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Equipment Configuration: Main unit (clean room compatible) and cooling water circulation unit ■ Substrate Size ・Mold: φ2 inches or less ・Sample substrate: φ4 inches or less ■ Substrate Temperature Adjustment Range: 20 to 200℃ ■ Step & Repeat: ±15mm in X and Y directions ■ External Dimensions (mm): ・Main Unit: 630W × 922D × 1670H ・Cooling Water Circulation Unit: 340W × 394D × 851H ■ Weight: ・Main Unit: Approximately 160kg ・Cooling Water Circulation Unit: Approximately 40kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Our company utilizes the latest mechatronics technology and strives for continuous improvement in quality to meet customer demands and build trust. Additionally, we engage in ongoing environmental conservation activities to promote sustainable business practices in harmony with the global environment and local communities.
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