A surface shape inspection machine capable of measuring minute height changes over a wide range! Extremely resistant to vibrations, eliminating the need for vibration isolation tables and devices!
The "CSM & CSYS series" is a laser scanning surface shape inspection machine capable of fast measurements with high sensitivity over a wide measurement range. Utilizing patented technology for "laser surface shape inspection," it inspects "surface shape," "roughness," "waviness," "particles," and "defects" of semiconductor wafers (Si, SiC, GaN, etc.), MEMS, hard disks, functional films for FPDs, and sputtered thin films with high sensitivity, quickly, and over a wide range, displaying "digital data" and "3D image data." 【Features】 ■ Non-contact laser scanning for surface shape measurement data display ■ High detection sensitivity allows for fast measurements over a wide range, with digital image display ■ High reliability due to simple optical detection principles and structure ■ Extremely resistant to vibration, eliminating the need for vibration isolation tables or devices ■ Capable of 100% non-destructive inspection in inline processes, with automation support *For more details, please request documentation or view the PDF data available for download.
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【Lineup】 ■CSYS 12-450 ■CSYS 12-300 ■CSYS 12-200 ■CSYS 12-100 *For more details, please refer to the PDF document or feel free to contact us.
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【Measurement Target Work】 ■ Mirror surfaces of semiconductor wafers, hard disks, masks, FPDs, etc. ■ Surface inspection of grinding processed surfaces, thin film sputtering, functional films, etc., including surface shape, roughness (Ra), scratches, defects, dirt, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Core System Co., Ltd. promotes the development of new technologies and commercialization to utilize the Earth's environmental protection and limited resources in a valuable, safe, and secure manner. Currently, we are focusing on providing services related to inspection automation devices, centered around the "laser scanning surface shape inspection machine" for quality control and process management in the manufacturing processes of materials for the IT industry, such as semiconductor wafers, magnetic disks, and masks. In the field of laser surface shape inspection machines, we are advancing the technological development and commercialization of new types of surface shape inspection machines to ensure processing quality for new control IC materials related to energy-related power generation smart grids, electric and hybrid vehicles, and railway vehicles. Furthermore, as part of our efforts in new fields, we are pursuing technological development and commercialization aimed at realizing "high-efficiency, high-quality, high-performance, low-cost devices for control systems for distributed power supply systems." We will continue to focus on product development and services using new technologies that contribute to society, with the support and guidance of everyone.