A compact and space-saving tabletop particle inspection device ideal for device development and wafer cleaning checks!
It is a non-pattern wafer and substrate surface particle inspection device. It is a manual transport tabletop inspection device that does not take up much space. It is easy to install in labs or next to equipment. It can measure not only silicon but also glass materials.
Inquire About This Product
basic information
Detection sensitivity: 0.15μm (bare silicon) Laser wavelength: 405nm Compatible wafer sizes: 2-8 inches, square substrates within 200mm. External dimensions: (W) 548 x (D) 672 x (H) 1009mm Power supply: (electric) 100V, (vacuum) -70kPa or less, 6mm quick-connect fitting. *The installation stand must be provided by the customer. *An operation notebook PC is included, but it is separate from the main unit.
Price information
Please contact us.
Price range
P7
Delivery Time
Applications/Examples of results
Confirmation of particles after wafer and substrate cleaning. Confirmation of contamination in the process equipment chamber. Confirmation of the quality after film deposition treatment. Confirmation of shipment for wafers and substrates. Acceptance inspection of wafers and substrates.
catalog（1）
Download All Catalogs
Company information
Our company was established in 1994 with the aim of developing and manufacturing inspection and testing equipment for semiconductor and liquid crystal manufacturing processes. Currently, we are focusing our business on semiconductor wafer inspection equipment, which is being adopted by a wide range of customers. In recent years, we have developed and sold particle inspection models for compound wafers that support energy-saving technologies and next-generation communications, and we are advancing into next-generation semiconductor inspection equipment. We will continue to strive to provide attractive products in the future.
