For vacuum processes in (extreme) UHV applications
- The seal uses the FLEX VATRING method. - Deformation of the sealing surface is within the range of elastic deformation. - Standard hex wrench, no torque management required. - High conductance. - FLEX VATRING can be replaced up to two times.
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basic information
Leak rate (valve body, valve seat): < 1 × 10^-10 mbar ls^-1 Operating pressure range: XHV to 2 bar (abs) Maximum allowable differential pressure across the gate: ≤ 2 bar Maximum allowable differential pressure when opening the valve: ≤ 1 bar Valve lifespan: ≥ 1,000 cycles Bake-out temperature: ≤ 300 °C (in open and closed positions) Heating and cooling rate: ≤ 60 °C h^-1 Material (valve body, mechanism, bellows): AISI 316L (1.4404, 1.4435) Seal (bonnet, plate): Metal Shaft seal: Bellows Mounting direction: Free Valve open/close position indication: Mechanical visual position indication included Conductance (molecular flow): DN16 5 ls^-1 DN40 50 ls^-1 DN63 105 ls^-1 Force required for closure: Tighten until mechanically stopped
Price information
Consultation required.
Delivery Time
※Consultation required.
Applications/Examples of results
Ideal for use in ultra-high vacuum.
Line up（3）
| Model number | overview |
|---|---|
| 54124-GE02 | Hex Head |
| 54132-GE02 | Hex Head |
| 54136-GE02 | Hex Head |
catalog（1）
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.