A compact deposition device that is easy to use on a tabletop.
"Mebius" is a compact deposition device suitable for experiments and teaching materials for students. The power supply can be connected to a standard household AC 100V wall outlet. The chamber can accommodate multiple sub-chambers according to various applications due to its split design. 【Overview】 - The evaporation source is equipped with two tungsten boats. - The exhaust system consists of a combination of a turbo molecular pump, an electromagnetic forepump, and an oil rotary pump. - By adopting a multi-vacuum gauge that requires no operation, continuous pressure display from atmospheric pressure to high vacuum is possible. - Equipped with a magnet-driven substrate shutter. - In the event of a power outage, the device operation automatically pauses, and an emergency stop switch is also provided. *For more details, please download the PDF or feel free to contact us.
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【Performance】 ■Delivery time after order: Approximately 2.5 months ■Resistance boat: Capable of heating up to around 2700°C with tungsten ■Maximum input current: Approximately AC 100V 11A at 120A for the boat (based on past performance) ■Substances that can be evaporated: Ni (as of November 2017) ■Boat size: Width 6–10mm / Thickness 0.2–0.15mm For detailed performance inquiries, please contact us for consultation. *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
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Our company mainly designs and manufactures equipment that applies vacuum technology. Vacuum technology is a foundational technology for all industries, and we believe it plays an important role in supporting industries at their core. It is widely applied in various sectors, including the IT industry represented by optical communications, as well as the semiconductor and electronics industries, and in areas such as environmental and energy issues, healthcare, and food.