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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Wafer processing/polishing equipment
  6. Batch-type cleaning equipment

Batch-type cleaning equipment

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last updated:Nov 13, 2025

日精 本社
日精 本社
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We provide batch-type cleaning equipment that utilizes cleaning technology and transport/control technology, compatible with various chemical solutions.

With years of experience backing us, we utilize clean technology, transport/control technology, and more to design and manufacture optimal equipment for our customers with our total engineering capabilities. Using various engineering tools, including 3D CAD, we deliver space-saving and user-friendly equipment. *For more details, please download the PDF or contact us.*

    Wafer processing/polishing equipment
wafer.jpg

Batch-type cleaning equipment

wafer.jpg
wafer.jpg
  • Special site - Product/service details - https://pr.mono.ipros.com/nissei/product/

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basic information

Device Specifications [Cleaning Target] Up to 12-inch cassette (please consult for applicable sizes) [Tank Configuration] Loader (can be underwater) → Processing tank (up to 9 tanks) → Unloader *Drying is selected based on the above drying methods.

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Delivery Time

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Applications/Examples of results

Device Configuration 【 Chemicals 】 Inorganic chemicals such as APM, HPM, SPM, organic chemicals such as IPA developer, and various cleaning solutions 【 Transport 】 Cassette/Drum and carrierless 【 Cleaning Targets 】 Spin dryer / Rinse dryer / IPA dryer

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Batch cleaning equipment

Batch cleaning equipment

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日精

日精 本社

Machine elements and parts

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We respond flexibly and promptly to customer needs. In the "trading company" functional area, we are fully committed to providing truly attractive products and services that meet customer needs by collaborating with leading specialized manufacturers and utilizing advanced mechatronics technology to add value, thereby adapting to a highly information-oriented society. In the "mechanical parking equipment" business, we manufacture and install high-quality, environmentally friendly, and safety-conscious products to meet various customer needs. Based on our accumulated wealth of experience and technology, we provide 24-hour maintenance services through a nationwide service network, earning strong trust from our customers. The "freeze-drying equipment" business consistently develops next-generation "freeze dryers," including the sealed tube-type freeze dryer, which received the Minister of Economy, Trade and Industry Award from the Japan Industrial Machinery Manufacturers Association. We deliver and maintain both small-scale research and large-scale production equipment, and we also support the development of pharmaceuticals and food, establishing ourselves as an industry leader and receiving high praise. ◆ Locations Sapporo, Hitachi, Nagoya, Osaka, Fukuoka, Yamaguchi ◆ Overseas Subsidiary Thailand - Business activities: Sales of resin molded products, metal processed products, sheet metal, packaging materials, and electronic components.

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