It is possible to raise the temperature up to around 1000℃! This is a compact heat exchanger with a body size starting from 11 centimeters. *Demo units available for loan.
The "Heat Beam Cylinder" is compact yet capable of efficiently and instantly heating fluids such as gases and liquids to high temperatures, reaching up to around 1000°C. It is a clean heating method, making it suitable for heating process gases. By using high-temperature N2 generated by heating nitrogen in the exhaust line of semiconductor manufacturing equipment, it can prevent the adhesion of reaction products. Additionally, water can be directly heated to create a superheated steam generation device, which is expected to have various applications. 【Features】 ■ Generates superheated steam at over 900°C, allowing for use in a wide range of fields ■ Its compact size enables the generation of superheated steam close to the point of use ■ Direct generation of superheated steam from water is possible, eliminating the need for a boiler ■ Flexible arrangement and combination options allow for parallel, series, vertical, horizontal, and direct connection to devices *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Specifications of type SS】 ■Body size (mm): 104×55×36 ■Body weight: 0.7 kg ■Power: 100V 200V, 100W, 120W, 150W, 170W ■Piping (inch): 1/4 ■Gas examples: N2, H2, H2O ■Gas Flow: ~40L/min ■Example of temperature (℃) at a flow rate: 330@10SLM, 180@20SLM *For more details, please refer to the PDF document or feel free to contact us.*
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■ Cleaning of exhaust piping for CVD equipment ■ Generation of superheated steam ■ Heating of CVD equipment chambers ■ Melting of waste plastics ■ Low-temperature heating of CNTs and transparent conductive films ■ High-efficiency combustion *For more details, please refer to the PDF document or feel free to contact us.
catalog(2)
Download All CatalogsCompany information
Our company has been continuously supporting our customers' technology and product development with advanced semiconductor technology using test wafers for over 20 years. Our know-how and experience have transcended the boundaries of semiconductor manufacturing and culminated in the development of the gas instant heating component, the "Heat Beam Cylinder." This technology is expanding its application not only in the semiconductor field but also across various industrial sectors, demonstrating its achievements and effectiveness. If you have any technical inquiries or product requests, please feel free to contact us at any time.