Achieve nanometer resolution, high reproducibility, and high retention with linear encoders! Custom manufacturing is also available.
This is the comprehensive catalog for our high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) that we design, manufacture, and sell. It covers specifications, configurations, prices, and more for feedback stages, feedback stage controllers, cables, and options. We also accept orders for custom and special products. Please feel free to consult us. 【Features of Atmospheric Systems】 We develop, manufacture, and sell compact positioning devices with built-in linear scales. They are used in semiconductor-related equipment, communication-related applications, and optical systems for advanced research. 【Features of Vacuum-Compatible Systems】 Since our establishment, we have leveraged the know-how gained from producing custom products to provide high resolution and high precision reproducibility for vacuum applications. *You can view the comprehensive catalog by downloading the PDF. Please feel free to contact us via the inquiry form for any requests. Additionally, the link below introduces examples of custom product manufacturing.
![Toppage_FeedBackStageSystemCatalog[NO5].jpg](https://image.mono.ipros.com/public/product/image/f78/2000409904/IPROS03751665310446653050.jpeg?w=280&h=280)
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basic information
◎Atmospheric Positioning Device This positioning device achieves high resolution, high repeatability, and high positional stability through a feedback stage equipped with our self-developed optical linear scale and a feedback stage controller with unique feedback control functionality. ◎Vacuum-Compatible System By combining a feedback stage with an integrated optical linear scale and a feedback stage controller equipped with our proprietary control circuit, we have realized full closed-loop control in a vacuum environment. *For more details, please refer to the catalog. Feel free to contact us with any inquiries.*
Price range
Delivery Time
Applications/Examples of results
Research, development, and inspection requiring precise positioning Research applications in the optical field Sample stage of semiconductor lithography equipment Microscope stage
Line up（9）
| Model number | overview |
|---|---|
| FS-1020UPX | 20mm stroke, 1nm resolution (internal scale reading) operation |
| FS-1020SPX | 20mm stroke, 5nm resolution (internal scale reading) operation |
| FS-1020PX | 20mm stroke, 10nm resolution (internal scale reading) operation |
| FS-1020X | 20mm stroke, 100nm or 50nm resolution (internal scale reading) operation |
| FC-911 | 1nm resolution feedback stage controller |
| FC-611 | 5nm resolution feedback stage controller |
| FC-511 | 10nm resolution feedback stage controller |
| FC-411 | 50nm resolution feedback stage controller |
| FC-111 | 100nm resolution feedback stage controller |
catalog（1）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.