Thickness measurement of various materials, capable of handling both during and after processing across a wide measurement range with a single device! Also suitable for wafer inspection applications.
The PreciTech 2IT series is a non-contact thickness measurement sensor that utilizes spectral interference methods. It excels in high-speed and high-precision thickness measurements and is used for measuring and inspecting the thickness of wafers, films, coatings, and air gaps. It is also capable of measuring impurity/doped wafers. Other features include a wide measurement range, large allowable angles, and compatibility with various materials. There is also an area scanner that allows for surface measurements without scanning via a moving stage. There are numerous instances of its incorporation into semiconductor manufacturing equipment, and it is also used in LCD manufacturing equipment, film thickness monitoring, in-situ, and inline inspections. Additionally, it is utilized as a sensor for desktop machines such as standalone units. **Applications**: Thickness measurement before and after wafer processing (such as polishing), thickness measurement during processing, film/coating thickness measurement, glass wafer thickness inspection, TTV, thickness distribution, PCB coating thickness, battery foil thickness, glass thickness, air gaps, and more.
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【Product Lineup】 - Single Point Sensors (2IT, 2IT-DW, 2IT-RW) These are sensors for thickness measurement, allowing selection of appropriate lighting based on surface condition and material. The 2IT-DW series is optimal for measuring doped wafers, while the 2IT-RW series is best for rough-surfaced wafers. They can perform high-speed measurements of up to 70kHz and cover a range from thin films (a few micrometers) to thick films (1260 micrometers) with multiple probes. - Area Scanner Sensors (Flying Spot Scanner) This type allows area scanning with a 2-axis galvanometer. It is unaffected by vibrations and does not require an operating stage. Available in φ40, φ80, and φ300mm types, it can perform high-speed measurements of up to 70kHz. 【Other Features】 - Measurement Range: 2IT1000 60μm–8000μm (n=1) 2IT500 35μm–4000μm (n=1) - Resolution: Up to 1nm (n=1) - Interface: Ethernet, RS422, Analog (2ch) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us. 【Keywords: Applications, Measurement Items, Benefits, etc.】 Non-contact sensors, optical sensors, optical sensors, spectral interference method, thickness, thin films, thick films, gaps, TTV, measurement, inspection, high speed, high precision, inline, monitoring, in-situ, during processing, before and after processing, semiconductors, wafers, Si wafers, Si, GaAs, InP, SiC, LiNbO3 (LN), LiTaO3 (LT), GaN, SiP, Al2O3 (sapphire), glass, quartz glass, silica glass (medical ampoules), display glass, medical balloons, barrier films, PET films, coatings, films, multilayer films, coated films, conformal coatings, electrode layer coatings, stent coatings, polyimide, PVB, resin materials, flux, adhesives, insulating films, air layers, transparent, transparent bodies, simple.
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Presitech is a specialist in laser material processing and optical measurement technology. We are not just a supplier of systems and components, but a professional partner in ensuring a smooth processing process for our customers. We offer consultations from the foundational stage and accurately consult with customers on their requests and objectives. We understand that the key to success in unique processing processes lies in the four components of exhibition, monitoring, processing, and control. Only by doing so can we provide appropriate solutions for our customers' applications. Our high-quality products, such as laser processing heads, quality monitoring systems, and optical measurement systems for spacing/thickness measurement, allow customers to directly benefit from our decades of experience. Our optical sensors are characterized by the highest precision and dynamic adaptability. Furthermore, they detect accurate values even in high-speed measurements.
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