Depth direction analysis will be conducted to a depth of several micrometers.
XPS is a surface-sensitive technique widely used for evaluating sample surfaces, but when combined with ion etching, it allows for depth analysis. In addition to the compositional distribution in the depth direction, XPS also enables the assessment of bonding states, making it suitable for investigating the causes of discoloration on the surfaces of device components. This document presents a case study evaluated by XPS regarding the discoloration of the blades of a turbo molecular pump.
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For detailed data, please refer to the catalog.
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Applications/Examples of results
Analysis of manufacturing equipment and components.
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Download All Catalogs![[Analysis Case] Depth Direction Analysis of XPS on the Micron (μm) Order_C0529](https://image.mono.ipros.com/public/catalog/image/01/1da/452915/IPROS77954561474729401693.jpeg?w=120&h=170)
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!
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