A wafer that can easily and reliably collect microscopic foreign substances in contact with the back surface.
Our company handles a wafer-shaped cleaning material called "Cleaning Wafer," which collects foreign substances adhering to the robotic arms and chuck tables of semiconductor manufacturing equipment. By setting the cleaning surface facing down in the wafer cassette and automatically transporting it within the equipment, it can collect minute foreign substances that cause troubles, significantly improving the equipment's operating rate. 【Features】 - Equipped with a cleaning layer that combines foreign substance collection capability and automatic transport on one side of the dummy wafer. - Significant time savings can be expected in resolving troubles caused by foreign substances in the vacuum chamber compared to conventional methods. - Compared to traditional manual cleaning, it is simpler and superior in frequency, accuracy, and responsiveness. *For more details, please download the PDF or contact us.*
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【Applications】 ■ Process equipment for the front-end of semiconductor manufacturing, particularly processes with frequent foreign object issues in vacuum chambers ■ General process equipment for the mid-end of semiconductor manufacturing ■ Equipment with narrow stages that are difficult to clean manually *For more details, please download the PDF or contact us.
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For more details, please download the PDF or contact us.
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Nitto Denko Corporation (Nitto) was founded in 1918 in Osaki, Tokyo, with the aspiration to achieve the domestic production of insulating materials. Since its inception, Nitto has faced numerous crises, but by pouring everything it has into each product and pursuing customer service, it has overcome these challenges and laid the foundation for the current Nitto Group. Always walking alongside its customers, Nitto now provides a variety of products based on its core technologies of adhesive and coating, expanding its business globally in areas such as the electronics industry, automotive, housing, infrastructure, environment, and healthcare. Today, social issues are becoming increasingly diverse and complex, changing at an unprecedented pace. In this context, the Nitto Group is committed to tackling the challenge of balancing social issue resolution with economic development, aiming to be a necessary presence in society that contributes to a more comfortable life for people. Under the management philosophy of "Contributing to customer value creation with new ideas," the Nitto Group sees societal changes as opportunities, continuously generating surprises and excitement, and creating value that is recognized by society.