Maximum reaching temperature of 1,000℃! This is a high-speed annealing heating device that can be integrated into inline systems as well as for prototype development purposes.
The "RTP/VPO series" is a tabletop type high-speed annealing device for vacuum and process gases. It includes models such as "RTP-150," which is suitable for research and development requiring high purity and stability, such as the thermal oxidation process of SiC and crystal growth of GaN, as well as "RTP-100" and "VPO-1000-300." 【RTP-150 Features】 ■ Compatible with 6-inch wafers ■ Maximum achievable temperature of 1000℃ ■ Achieves linear temperature control ■ Significantly reduces the occurrence of contamination ■ Options available to accommodate various experimental environments *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 Maximum reaching temperature of 1000°C The device is equipped with a cooling mechanism as standard. It achieves a maximum reaching temperature of 1000°C while ensuring safety. Therefore, it can easily handle not only annealing processes for SiAu, SiAl, SiMo, etc., but also sintering processes for paste materials. Supports rapid heating/cooling Equipped with a high-speed infrared (IR) heater, it can achieve rapid heating of over 4500°C per minute (over 75°C per second). Of course, it is also possible to heat at any desired rate according to the set values in the profile program. In the cooling process, nitrogen gas is supplied into the chamber for cooling, allowing for safe cooling without damaging the surface of the device after processing. Supports a variety of gas purge environments It can be equipped with up to 4 systems of MFC (mass flow controllers), allowing for annealing in vacuum environments, atmospheric environments, and any desired process gas purge environment. The profile program can register not only ON/OFF control for various gas systems but also their flow rates, making it easy to reproduce various environments.
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【Lineup】 ■RTP-100 ■RTP-150 ■VPO-1000-300 *For more details, please refer to the PDF document or feel free to contact us.
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We sell and provide maintenance for a benchtop vacuum solder reflow device that enables soldering without flux and voids, as well as a benchtop vacuum process high-speed heating furnace that achieves annealing in various chamber environments such as vacuum and process gas environments.