In the CMP process, a regeneration technology for polishing pads that can significantly reduce costs has been developed.
A polishing pad regeneration technology has emerged that can significantly reduce costs in the semiconductor planarization (CMP) process.
Inquire About This Product
basic information
Not only does it reduce the unit price of pads, but it also achieves a reduction in attachment/detachment time and startup time. This is the only technology that has realized the regeneration of CMP pads, making it the world's first. By reducing waste, it is also attracting attention from an environmental perspective. Despite being regenerated pads, it achieves a level of polishing that is indistinguishable from new ones through high-level processing.
Price range
Delivery Time
Applications/Examples of results
CMP
catalog(1)
Download All CatalogsCompany information
We are waiting for your inquiries and consultations regarding our products and services, such as the following: ■ Particle Size Distribution and Powder Measurement - I want to replace my particle size analyzer, but it's too expensive to implement. - I want to introduce an easy-to-operate particle size analyzer. - I want to measure particle size distribution in the nano range at a low cost. ■ Fluid Measurement and Visualization - Concerns about the visualization and quantification of fluids. - I introduced PIV software, but I can't measure effectively. - I want to simultaneously measure the flow velocity and particle size of spray particles. ■ Strain and Displacement Measurement - I want to measure strain in areas where strain gauges cannot be attached. - I want to analyze strain and displacement non-contactly. - I want to measure the distribution of strain over a surface. ■ Thin Film and Porous Material Evaluation - I would like to consult about mercury porosimeters that will no longer be usable due to the Minamata Convention. - I want to evaluate the gas diffusion performance of GDL and MEA in fuel cells. - I want to measure the permeability of barrier films at high speed. We welcome any inquiries, no matter how trivial, so please feel free to consult with us. We also have a lab room available for demonstrations and product tours.