8-inch wafer compatible! Macro-micro inspection device equipped with a transmissive mapping sensor.
The "SYAR120" is a microscope macro-micro inspection device compatible with 8-inch TAIKO wafers, incorporating a tabletop robot, aligner, and macro unit. After removing the designated wafer from the cassette, it is transported to the macro unit for observation of both sides. Arbitrary coordinate control is possible via a joystick. It is equipped with an anti-static PVC cover and various interlocks. 【Features】 - Supplies to the microscope XY stage after centering and alignment positioning with the aligner - Equipped with a transmissive mapping sensor - Arbitrary coordinate control possible via joystick - Equipped with an anti-static PVC cover and various interlocks *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Application】 ■LED/MEMS/Power Device Field *For more details, please refer to the PDF document or feel free to contact us.
catalog（2）
Download All Catalogs
Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."