High rigidity design enables high-speed transport of third-generation glass substrates! Double-arm clean robot.
The "LR31000-600" is a compact body, long-stroke direct-drive double-arm clean robot. With a high-rigidity design, it transports third-generation glass substrates at high speed. It is designed for easy docking with the lateral slide axis. The slide axis is equipped with an incremental encoder and can be controlled by a servo motor. 【Features】 ■ Compact body, long stroke ■ Easy docking with the lateral slide axis ■ Slide axis: Incremental encoder specification, controllable by servo motor ■ Equipped with a two-phase pulse motor with encoder *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications】 ■ Arm - Operating range: 1000mm - Transport speed: 1000mm/1.2sec - Resolution: 10.2539μm ■ Rotation - Operating range: 330 degrees - Transport speed: 180 degrees/1.4sec - Resolution: 0.0028 degrees ■ Up and Down - Operating range: 600mm - Transport speed: 600mm/2.0sec - Resolution: 5μm ■ Item being transported: 24-inch glass substrate with a thickness of 1.1 ■ Repetition accuracy: within ±0.1mm ■ Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■ FPD Field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."