Reduce manufacturing costs by increasing the sheet metal ratio and simplifying the structure! Link-type clean robot.
The PR2111-60 is a link-type double-arm clean robot equipped with various sensors. By increasing the sheet metal ratio and simplifying the structure compared to our conventional products, we achieve a reduction in manufacturing costs. It is equipped with a vacuum suction type ceramic chuck. 【Features】 ■ All axes use 2-phase stepping motors ■ Chuck: Ceramic chuck (vacuum suction type) optional ■ Equipped with various sensors ■ Reduction in manufacturing costs by increasing the sheet metal ratio and simplifying the structure *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ■Arm ・Operating range: 370mm ・Transport speed: 370mm/0.5sec ・Resolution: 21.6μm or less ■Rotation ・Operating range: 330 degrees ・Transport speed: 180 degrees/0.6sec ・Resolution: 0.00556 degrees ■Up and Down ・Operating range: 60mm ・Transport speed: 60mm/0.5sec ・Resolution: 5μm ■Object to be transported: 8-inch silicon wafer, untreated ■Repeatability: ±0.1mm or less ■Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application】 ■Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."