We can introduce SOS wafers (silicon-on-sapphire wafers) with diameters of 3 inches, 4 inches, and 6 inches.
SOS wafers are wafers on which silicon is epitaxially grown on the R-plane of sapphire substrates. They are used in various devices such as pressure sensors and are characterized by their high resistance to radiation. We can offer SOS wafers in sizes of 3 inches (76mm), 4 inches (100mm), and 6 inches (150mm). Depending on the specifications, we may also be able to accommodate 8-inch wafers, so please feel free to inquire. The dopant for the epitaxial layer is Phosphorous for N-type and Boron for P-type. We can accommodate small quantities as well.
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basic information
The standard main specifications are as follows: Diameter: 150 mm Epitaxial thickness: 0.3 um +/- 10% In-plane uniformity um (%): 0.05 um (16.7%) Epitaxial resistivity: >30 ohm cm UVR: <1.0 Diameter: 100 mm Epitaxial thickness: 0.3 um +/- 10% In-plane uniformity um (%): 0.05 um (16.7%) Epitaxial resistivity: >30, 5-30, 2.5-10 ohm cm UVR: <1.0 Diameter: 100 mm Epitaxial thickness: 0.6 um +/- 10% In-plane uniformity um (%): 0.09 um (15%) Epitaxial resistivity: >30, 5-30, 2.5-10 ohm cm UVR: <0.75 The main specifications are as above, but please contact us if you have specific requirements.
Price information
It varies depending on the diameter, specifications, and quantity, so please contact us.
Delivery Time
※Short delivery times are possible depending on the product.
Applications/Examples of results
It is used in various devices such as pressure sensors.
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Company information
Enatech handles a wide range of silicon wafer-related products and responds quickly and accurately to customer requests. With over 40 years since its establishment, we have supported a part of the semiconductor industry, primarily in the Si field. Through cooperation with silicon manufacturers and processing companies both domestically and internationally, we provide a stable supply of silicon materials not only to Japan but also to overseas markets. We mainly sell evaluation test wafers and film deposition wafers to semiconductor and solar cell manufacturers (as well as contract processing such as regeneration), and in the field of dummy wafers, we have two warehouses for Si sorting processes in Japan, allowing us to introduce various types of wafers to meet customer needs. In addition to CZ silicon wafers, we also handle FZ silicon wafers, SOI wafers, diffusion wafers, SiGe, GaAs, InP, sapphire, germanium, SiC wafers, used equipment for semiconductors, ferrite cores, iron oxide, high-purity chemicals, and more.