This is an introduction to a batch-type ion milling device that enables both high uniformity and high throughput.
The "IM-580 Series" is a batch-type ion beam milling device suitable for processing large substrates and a large number of pieces. It features a bucket-type ion source with a maximum diameter of φ580. It can accommodate non-standard substrates such as square-shaped substrates, support mixed non-standard substrates, and is compatible with various substrate sizes. We offer free sample processing tailored to your application for the first time. Please contact us regarding wafer sizes, processing quantities, and other inquiries. 【Features】 ■ Maximum φ580 bucket-type ion source ■ Achieves both high uniformity and high throughput ■ Capable of controlling both high and low etching rates ■ Self-rotating stage for wafers (substrates) ■ Compatible with non-standard substrates such as square-shaped substrates, supports mixed non-standard substrates, and is compatible with various substrate sizes ■ Filament-free μ-wave neutralizer (optional) *For more details, please refer to the external link or feel free to contact us.
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basic information
【Lineup】 ■IM-580 ■IML-580-LL *For more details, please refer to the external link or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Microfabrication for magnetic heads ■ Microfabrication for printer heads and others *For more details, please refer to the external link or feel free to contact us.
Company information
The corporate philosophy aims to be a company that is "trusted" by all stakeholders, and through business activities based on "value creation" using high-tech solutions, it contributes to the progress and development of society. Currently, we are engaged in global business development across five segments: "Electronic Device Systems," "Finetech Systems," "Scientific and Medical Systems," "Industrial and IT Systems," and "Advanced Industrial Materials." We will also organically integrate "trading company functions" and "manufacturing functions" to respond to our customers' needs as an advanced technology company.