Introducing a device compatible with 8-inch wafers for observing wafer appearance through visual inspection and microscopy!
This product is a device for observing the appearance of wafers through visual inspection and microscopy. It can transport and observe the wafer without contacting the central part, thanks to the edge grip hand. In the macro unit, both sides of the wafer can be observed at any angle. In the micro unit, the electric XY stage moves to pre-registered coordinates, allowing multiple specified coordinates to be observed continuously with just one trigger button. 【Features】 ■ Compatible with 8-inch wafers ■ Transport and observe without contacting the central part of the wafer using the edge grip hand ■ Macro unit: capable of observing both sides of the wafer at any angle ■ Micro unit ・Electric XY stage moves to pre-registered coordinates ・Multiple specified coordinates can be observed continuously with just one trigger button *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■ Double Arm Robot ■ Alina ■ Macro Unit ■ Micro Unit ■ Vibration Isolation Table ■ Control Equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."