The load port is moving to a new stage. The movable parts have a structure that enhances particle performance.
The "TAS450" is a standard load port designed to automatically open and close FOUPs (Front Opening Unified Pods) used in semiconductor manufacturing processes, and it can be installed on various semiconductor manufacturing equipment. It offers top-class performance in terms of low particle generation and high throughput, which are required by semiconductor manufacturing equipment. 【Features】 ■ SEMI Standard E154 ■ All moving parts, including the mapping unit, are located below the wafer surface, enhancing particle performance ■ Mapping unit (transmissive sensor) can be optionally installed ■ Equipped with obstacle detection functionality during FOUP docking ■ Equipped with FOUP presence detection and proper placement detection functionality when FOUP is loaded *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Excerpt)】 ■ Target FOUP ・450mm FOUP compliant with SEMI-E158 and E154 ■ Dimensions and Weight ・Overall height: 1437mm ・Overall width: 630mm ・Depth: 573mm (from BOLTS interface surface) ・Weight: 115kg (excluding various options other than the mapper) ■ Docking Mechanism ・FOUP clamp: Hold Down Feature (air-driven) ・FOUP door retention: vacuum suction ・Wafer position during docking: 254mm from BOLTS interface surface *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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TDK Corporation is a company that primarily develops and commercializes devices such as magnetic heads, magnets, power supplies, and batteries. Our main products are passive components, including ferrite cores, coils, transformers, ceramic capacitors, and sensors, which are fundamental components used in all electrical and electronic devices. Currently, we are engaged in product development and commercialization based on the technologies and know-how we have accumulated and refined in these areas.