High-performance maskless aligner for production
The MLA300 is an industrial production version of a maskless aligner that has already become the standard in the fields of research and development applications, rapid prototyping, and low to medium volume production. The MLA300 achieves high resolution with a line and space of 2 µm while maintaining the high throughput and availability expected in production facilities. It is equipped with a wafer robot and load port, as well as software specially designed for production environments, to accommodate automation for streamlining workflows.
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basic information
Maximum exposure area: 300 mm x 300 mm Minimum feature size: 1.5 μm Minimum line and space: 2 µm Maximum writing speed: 5000 mm²/min (at 405 nm, with 1 module) Real-time autofocus Front and back alignment Full auto-loader Multiple module installation available
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Applications/Examples of results
Sensors, sensor ICs, MEMS devices, discrete electronic components, analog and digital ICs, ASICs, power electronics, OLED displays, and advanced packaging applications.
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Company information
Heidelberg Instruments, Inc. is the Japanese subsidiary of Heidelberg Instruments Mikrotechnik, a German company that develops and manufactures laser direct writing systems and mask writing systems. We provide sales and technical services for laser direct writing systems within Japan. We offer a wide range of products, including laser writing systems and maskless aligners. For anything related to laser lithography, please feel free to consult with us.