Semiconductor industry, trench measurement AFM, SPM probes, cantilevers

High aspect ratio SPM/AFM probes that can fit into narrow groove structures!

This product is suitable for quantitative measurements in the depth direction, which are difficult to measure with laser microscopes, such as line & space and trenches. Are you struggling with low surface shape reproducibility with your current probe? Cases where the groove shape is not accurately measured due to the opening angle of the probe tip can be improved by using a probe with a high tip aspect ratio. 【Features】 ■ Well-suited for quantitative measurements in the height direction, which are difficult to measure with laser microscopes ■ Improves cases where the groove shape is not accurately measured due to the opening angle of the probe tip *For more details, please refer to the related link page or feel free to contact us.

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