Compact size that can be installed on a desk! Suitable for university research labs.
The SP-1321 is a device for heating small substrates in high vacuum. By incorporating a load lock chamber, it is possible to keep the heating chamber in a clean state at all times. In addition to enabling heating in high vacuum, it achieves stable temperature control through programmed temperature control. Its compact size allows for installation on a desk, making it suitable as an experimental device in research laboratories. 【Features】 - Heats small substrates in high vacuum - Capable of heating in high vacuum - Heater temperature can reach 500°C (Max 800°C) - Achieves stable temperature control through programmed temperature control - Various ports of the heating chamber utilize ICF70 flanges to accommodate high vacuum *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 - Free combination with or without a load lock chamber, and with your existing exhaust unit, vacuum gauge, and valves. - If you already have an exhaust unit, vacuum gauge, or valves, it is also possible to combine them with these devices. - To keep the heating chamber in a clean state, a manual fixture for substrate transport can be equipped with the load lock chamber. *For more details, please refer to the PDF materials or feel free to contact us.
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【Usage】 ■Experimental equipment for laboratories and similar settings *For more details, please refer to the PDF document or feel free to contact us.
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Our company provides a wide range of services from the design, development, and manufacturing of ultra-high vacuum equipment for research to industrial vacuum equipment. We respond to inquiries regarding the selection of suitable equipment, the design and manufacturing of thin film devices and peripheral equipment, modifications for automation, overhauls, and the procurement of reused items, and we support our customers from the specification consideration stage based on their requests.