Development, manufacturing, and consulting of ultra-high-speed electron beam drawing technology and its elemental technologies! Contributing to society through precision processing technology.
PARAM Corporation is a company that develops electron beam technology using a parallel multi-column and multi-beam system for direct wafer writing with electron beams. In the near future, fine processing technology will be required to be below 5nm, and applications, including artificial intelligence chips, are needed in many fields as both development and mass production technologies. Our company will do our utmost to be of service to everyone with various electron beam element technologies and related technologies. 【Business Activities】 ■ Manufacturing and sales of ozone supply and exclusion devices for vacuum ■ Design, manufacturing, and contract development of electron beam columns ■ Contract development of electronic circuits for electron beam control *For more details, please refer to the PDF materials or feel free to contact us.
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【Electron Beam High-Speed Drawing System Technology】 ■ Multi-Beam Multi-Column System ■ High Brightness Electron Gun ■ Compact Lens *For more details, please refer to the PDF document or feel free to contact us.*
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For more details, please refer to the PDF document or feel free to contact us.
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PARAM Corporation is a company engaged in the development, manufacturing, and consulting of ultra-fast electron beam drawing technology and essential technologies. Through the development of core technologies such as multi-column technology using permanent magnets, high-brightness uniform irradiation long-life electron guns, and programmable shape-variable beams (PSB), we contribute to the advancement of society through device development and manufacturing.