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  4. Semiconductor Manufacturing Equipment
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  6. Precision Grinding Device "MA-150"

Precision Grinding Device "MA-150"

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MA-150

last updated:Jun 15, 2023

ムサシノ電子
ムサシノ電子
  • Official site

Ideal for polishing small samples! Designed and developed to allow one machine to be used for one purpose.

The "MA-150" is a personal-type polishing machine designed to be installed next to SEM, EPMA, TEM, etc., allowing one machine to be used for one specific purpose. Its compact size does not take up much space, making it suitable for polishing small samples, and it can polish materials such as semiconductor wafers, sapphire, SiC, glass, and ceramics. By using polishing discs and abrasives tailored to the sample, better polished surfaces can be achieved. 【Features】 ■ Personal-type polishing machine ■ Designed and developed to allow one machine to be used for one specific purpose ■ Better polished surfaces can be obtained by using polishing discs and abrasives suited to the sample ■ Compact size does not occupy much space, making it ideal for polishing small samples ■ Capable of polishing semiconductor wafers, sapphire, SiC, glass, ceramics, etc. *For more details, please refer to the PDF document or feel free to contact us.

    Other processing machinesWafer processing/polishing equipmentCMP Equipment
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Precision Grinding Device "MA-150"

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2020-09-29_15h53_00.png
  • Related Link - https://www.musashino-denshi.co.jp/grinder/kenma/m…

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basic information

【Control Panel】 ■ Switch: Easily switch between TIMER mode, RUN mode, and STOP. ■ Speed Adjustment Volume: Allows for stepless adjustment of the polishing wheel's rotation speed. ■ Timer: Can set the polishing time (up to a maximum of 99 minutes and 59 seconds). 【Examples of Materials Processed】 ■ Semiconductor materials (silicon, germanium, silicon carbide, strontium silicate, gallium arsenide, indium gallium arsenide, indium phosphide, indium gallium zinc oxide, gallium nitride, gallium oxide, cadmium telluride, etc.) ■ Optical materials (quartz glass, sapphire, fluorite lenses, spinel, phosphate glass, lithium borate, acrylic resin, CLBO, YiG, GGG, etc.) ■ Ceramic materials (alumina, zirconia, silicon nitride, ferrite, etc.) ■ Metal materials (steel materials, stainless steel, copper, gold, silver, platinum, aluminum, titanium, molybdenum, etc.) *For more details, please refer to the PDF document or feel free to contact us.

Price range

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Delivery Time

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※If in stock, the delivery time is approximately 2 weeks.

Applications/Examples of results

For more details, please refer to the PDF document or feel free to contact us.

Detailed information

  • TEM_holder_202102.jpg

    [TEM Holder] ● You can set the grinding amount, allowing for automatic grinding of the required amount. ● It can also be used for grinding resin-embedded samples and cylindrical samples. ● The precision of the grinding amount setting can be adjusted to within ±5μm (with a dial gauge that has a minimum reading of 1μm). ● It is possible to achieve parallelism accuracy within ±2µm after grinding. ● The stroke width is 5mm. ● We can also provide attachment plates for angled grinding at your desired angle. ● There is also a no-load type using springs available.

  • s_jig_holder.jpg

    Embedding Sample Holder It can securely hold resin-embedded samples (or cylindrical samples) with diameters of Φ25mm, Φ30mm, and Φ40mm, allowing for precise polishing. The image shows a holder for fixing one sample, but holders for three and six samples are also available.

  • multipurpose_holder_201909_02.jpg

    【Multipurpose Holder】 ● Samples can be bonded and polished using a fixture with a size of 40mm × 30mm for attachment. ● An angled polishing fixture (5° incline) for inclined polishing is included. ● With the clamping fixture, it is possible to polish both end surfaces by flipping the fixture while the sample is clamped. ● Custom manufacturing of fixtures is also available.

  • pantograph_mounting_holder_201911.jpg

    【Clamping Holder】 ● It is possible to set a plate-shaped sample at three clamping points and polish it at a right angle. ● The top and bottom surfaces can be polished without removing the sample, allowing for parallel finishing. ● We can accept requests for jigs of the desired thickness based on the sample size. Jigs for polishing at your desired angle can also be manufactured.

  • MA-150_cylinder_roller_02_201911.jpg

    Regarding the production of custom sample holders Our company also accepts the design and manufacturing of custom sample holders tailored to your samples. Please feel free to contact us.

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Model number overview
MA-150 Compact and easy to use, it allows for precise polishing work.

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Company information

ムサシノ電子

ムサシノ電子

Industrial Machinery

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Our company has been manufacturing polishing equipment, cutting machines, and scribers suitable for precision machining using the technical know-how we have cultivated over many years. We have a significant track record, particularly in cutting-edge technology fields such as semiconductors, ceramics, and optical communications. In addition to standard specification equipment, we also accept the design and manufacture of custom specifications tailored to our customers' needs. To meet the increasing demands for precision in machining and the diversifying needs, we will continue to advance with innovative ideas and technology.

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