High-performance nano lithography direct writing system
NanoFrazor Explore is a standalone nano-patterning system equipped with many unique features. It allows for the easy creation of high-quality nano-patterns and devices, and by incorporating a laser, it enables hybrid high-speed drawing of micro-patterns.
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basic information
The NanoFrazor lithography system is based on thermal scanning probe lithography technology. The core technology of NanoFrazor lies in its ultra-sharp, heatable probe, which enables the drawing and imaging of complex nano-patterns. The tip of the heated probe creates arbitrary high-resolution nano-structures through local sublimation of the resist. Standard pattern transfer methods such as lift-off or etching can then be applied. Additionally, imaging is performed using sensors located near the probe tip, allowing for feedback on patterning and acquisition of topology information, enabling high-precision alignment.
Price range
P8
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Applications/Examples of results
Rapid prototyping of nano devices Minimum size below 20nm, ultra-high-resolution patterning Nano-patterning of sensitive materials and devices Nanoscale material transformation 3D grayscale lithography Precise overlay and stitching Hybrid mix-and-match laser drawing
Detailed information
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14nm electrode gap formed by lift-off.
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MoS2 top-gate transistors with record on/off ratios of 1010. Significantly less damage and resist residues. Courtesy of Riedo group at NYU, see Zheng et al, Nat. Electronics 2019
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Overlay without marker a) Detect the position of nanowires in the resist stack and place electrodes b) SEM image after patterning
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Company information
Heidelberg Instruments, Inc. is the Japanese subsidiary of Heidelberg Instruments Mikrotechnik, a German company that develops and manufactures laser direct writing systems and mask writing systems. We provide sales and technical services for laser direct writing systems within Japan. We offer a wide range of products, including laser writing systems and maskless aligners. For anything related to laser lithography, please feel free to consult with us.