The PBN crucible and quartz ampoule are reusable! Introducing the movable VGF furnace.
The "MAT-150VGFHQ" is a movable VGF furnace that allows for the growth of crystals with few defects (EPD) due to its operation under an arsenic pressure of 1 atm. It is a vertical VGF manufacturing furnace designed for 4-inch wafers. After growth, the GaAs ingot and PBN crucible can be separated by immersion in liquid. Additionally, the PBN crucible and quartz ampoule can be reused. 【Features】 ■ Easily obtain crystals with few defects (EPD) ■ The GaAs ingot and PBN crucible can be separated by immersion in liquid after growth *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications (Partial)】 ■ Furnace Structure: Quartz Tube Type, Mobile ■ Maximum Temperature: 1300℃ ■ Operating Temperature: 1200℃ ■ Temperature Distribution: Approximately 1200±2℃ over about 200mm ■ Number of Zones: 6 Zones ■ Movement Speed ・Low Speed: 0.1–10mm/h ・High Speed: 3–300mm/min ・Movement Distance: 1650mm ■ Inner Diameter of Furnace Core Tube: Quartz Tube φ150mm for 4 inches ■ Atmosphere: Automatic Vacuum Replacement with Ar Gas ■ Vacuum Pump: Rotary Pump, etc. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is a furnace manufacturer specializing in crystal synthesis and thermal processing for research and development in compound semiconductors and electronic materials. We break away from traditional vertical organizations and are a nimble company that can quickly respond to customer needs. Based on our expertise in materials and extensive experience, we propose plans to create furnaces that truly meet our customers' requirements. Please feel free to contact us with any inquiries.