It is a gas flow type, capable of flowing N2 and O2 gases! A third gas can also be flowed as an option.
The "MAT-200KA" is an electric furnace developed as related equipment for the 4” & 6” GaAs-VGF furnace. It operates on a gas flow system, capable of flowing N2 and O2 gases. It is divided into three zones with independent control to extend the uniform temperature area. Additionally, a third gas can be flowed as an option. 【Features】 ■ Developed as related equipment for the 4” & 6” GaAs-VGF furnace ■ Divided into three zones with independent control to extend the uniform temperature area *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Partial)】 ■Furnace Type: 3-Zone Half-Split Vertical ■Material Processed: PBN Crucible approximately φ160mm ■Maximum Temperature: Up to 1100℃ ■Operating Temperature: Up to 1050℃ ■Temperature Distribution: 1000±5℃ approximately 350Lmm ■Heating Rate: 1050℃/4H ■Furnace Core Tube: Specially Shaped Quartz Tube approximately φ210mm ■Heating Element: Kanthal A1 Wire Semi-Circular approximately φ250mm ■Thermocouples: Type R, Type K, etc. ■Insulation Material: High-Temperature Fiber Molded Products, etc. *For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■A thermal treatment furnace for oxidizing the interior of PBN crucibles used for GaAs production *For more details, please refer to the PDF document or feel free to contact us.
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Our company is a furnace manufacturer specializing in crystal synthesis and thermal processing for research and development in compound semiconductors and electronic materials. We break away from traditional vertical organizations and are a nimble company that can quickly respond to customer needs. Based on our expertise in materials and extensive experience, we propose plans to create furnaces that truly meet our customers' requirements. Please feel free to contact us with any inquiries.
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