6-inch vertical VGF manufacturing furnace "MAT-200VGFHQ"

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last updated：Oct 28, 2020

マテルズ本社工場

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It is a furnace with a movable body that can easily obtain crystals with few defects (EPD).

The "MAT-200VGFHQ" is a VGF manufacturing furnace with a quartz tube-type movable furnace structure. Since it grows under an arsenic pressure of 1 atm, it is possible to obtain crystals with few defects (EPD) easily. The operating temperature is 1200°C, and the maximum temperature is 1300°C. Additionally, the GaAs ingot and PBN crucible can be separated by immersing them in liquid after growth. Furthermore, the PBN crucible and quartz ampoule can be reused. 【Features】 - The GaAs ingot and PBN crucible can be separated by immersing them in liquid after growth. - The PBN crucible and quartz ampoule can be reused. *For more details, please refer to the PDF document or feel free to contact us.

Related Link - http://www.matels.co.jp/

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basic information

【Specifications (Partial)】 ■ Furnace Structure: Quartz tube type, movable ■ Maximum Temperature: 1300℃ ■ Operating Temperature: 1200℃ ■ Temperature Distribution: Approximately 1200±2℃, about 200Lmm ■ Number of Zones: 6 zones ■ Movement Speed 　・Low Speed: 0.1–10mm/h 　・High Speed: 3–300mm/min 　・Movement Distance: 1650mm ■ Inner Diameter of Furnace Core Tube: Quartz tube φ200mm for 6 inches ■ Atmosphere: Automatic vacuum replacement type with Ar gas ■ Vacuum Pump: Rotary pump, etc. *For more details, please refer to the PDF document or feel free to contact us.