Introducing an inline resistance heater type liquid heating device that does not have metal ion leaching contamination.
At Nippon Excel Co., Ltd., we handle "Chemical Heaters." This product uses a resistance heater that accurately controls temperature in a short time for high-temperature heating of various chemicals used in RCA cleaning and wet etching. Furthermore, since only fluororesin and high-purity glass-like carbon are used in the liquid-contact parts, there is no risk of contamination from impurities, and it can handle acidic solutions, alkaline solutions, and organic solvents. 【Features】 ■ The heat transfer liquid-contact materials are made of high-purity glass-like carbon. ■ There is no concern about contamination from leached metal ions. ■ No surface protective film is required, so there is no decrease in performance due to peeling. ■ It can handle acidic solutions, alkaline solutions, and organic solvents. ■ It is equipped with a leak sensor to detect liquid leaks and a temperature switch to detect abnormal temperatures. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Partial)】 ■ Heating Method - Heating method using resistance heaters (cartridge heaters) - Direct circulation method through inline piping with the processing tank ■ Temperature Setting Range: 25℃ to 80℃ (varies depending on conditions such as operating environment and type of chemical solution) ■ Temperature Control Accuracy: ±0.5℃ (when setting temperature is between 50℃ and 80℃) *When PID values are set appropriately under constant operating environmental conditions ■ Heater Power: 6kW ■ Temperature Control Method: PID control with auto-tuning function ■ Temperature Setting Method: Setting via UP/DOWN keys, etc. *For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■Temperature management of chemical solutions used in semiconductor manufacturing wet processes ・Polymer removal solution ・RCA cleaning solution ・Etching solution ・Developer solution for lithography processes ■Plating solutions, various surface treatment solutions, and others *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since our establishment in 1963, we have contributed to the industrial sector by providing a wide range of services as a trading company specializing in industrial sealing components. In 1968, we became a designated dealer for Nippon Pillar Packing Co., Ltd., a leading comprehensive sealing manufacturer, and since 1981, we have been acting as their agent, supplying high-quality Pillar products such as gland packing, gaskets, mechanical seals, and fluororesin products (fittings, pumps, tubes, valves, etc.) to customers in the industrial machinery and semiconductor sectors.