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  5. Other inspection equipment and devices
  6. Photo Mask Substrate Inspection Device 'Torin G8/G10'

Photo Mask Substrate Inspection Device 'Torin G8/G10'

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last updated:Dec 24, 2020

土井精密ラップ
土井精密ラップ
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The measurement range can be up to a maximum of 2100×2000mm! The speed and positioning of the servo motor are controlled by a computer.

The "Torin G8/G10" is a photomask substrate inspection device that measures the thickness and flatness of substrates with high precision using two opposing semiconductor lasers, while standing vertically without applying stress to the photomask substrate. The measurement range can go up to a maximum of 2100×2000mm. The main base, columns, and sliding parts are all made of Indian black granite, and air bearings are used for the measurement axes, which are critical for accurate measurements. 【Features】 ■ Two semiconductor lasers measure with high precision ■ Air bearings are used for the measurement axes, which are crucial for measurement ■ One optical probe is used exclusively for mirror-finish substrates to obtain absolute thickness and both flatness *For more details, please refer to the PDF document or feel free to contact us.

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2020-12-21_16h40_14.png

Photo Mask Substrate Inspection Device 'Torin G8/G10'

2020-12-21_16h40_14.png
2020-12-21_16h40_14.png
  • Related Link - http://www.micro-granite.co.jp/

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【G8 Specifications (Partial)】 ■ Maximum measurement size: Y1400×1600mm ■ Measurement thickness: 5–20mm ■ Device dimensions: W2900×D1500×H2500mm ■ Weight: 8 tons, etc. *For more details, please refer to the PDF document or feel free to contact us.

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Photo mask substrate inspection device 'Torin G8/G10'

Photo mask substrate inspection device 'Torin G8/G10'

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土井精密ラップ

土井精密ラップ

Manufacturing and processing contract

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Doi Precision Lap Co., Ltd. is a company primarily engaged in lapping and polishing processes. As a pioneer in lapping processing, we are capable of achieving processing precision beyond that of precision grinding, thanks to our extensive experience and cutting-edge technology. We meet the processing needs of all materials, from hard materials such as carbide, ceramics, and stone to soft materials like aluminum and copper.

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