Devices can be selected according to the size of the processed items! Features, dimensions, and the number of carriers are also included!
This catalog introduces the equipment for IAG (Oxides, Sapphire, SiC, GaAs, Quartz, Ceramics, Metals, etc.) handled by Speedfam. It features standard models such as the "DSM 16B-5L/P-V," which can perform lapping and polishing regardless of material, and the "DSM10.5B-5L/P-V," which enables further stable processing with the addition of slurry flow and ALC fixed dimension system control. Details on features, dimensions, and the number of carriers are also provided. [Contents] ■Process and Application ■DSM 16B-5L/P-V ■DSM10.5B-5L/P-V ■FAM 50GPAW-III ■EPRO-212EN *For more details, please refer to the PDF document or feel free to contact us.
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Speedfam Co., Ltd. is a company engaged in the manufacturing and sales of polishing equipment and more. In today's information society, where technological innovation is advancing at an accelerating pace, the flat surfaces required for various device substrates essential for cutting-edge products demand ultra-precision finishing at the nanometer level. The needs for flatness in this ultra-precision processing process have no limits, requiring the achievement of high-precision and stringent numerical targets in parallelism, dimensional control, and flatness, along with high productivity, improved yield, and maintenance of cleanliness. Speedfam responds to various customer needs by developing both "equipment" and "consumable materials" with innovative technology and know-how, and we propose optimal processing processes.