Vacuum environment scanning suitable for fault analysis applications.
The "Park NX-Hivac" is a high vacuum atomic force microscope (AFM) designed for failure analysis and materials that are susceptible to environmental influences. It enables precise failure analysis of highly doped semiconductors. Additionally, by utilizing our already recognized technology, it has achieved low noise measurements with high resolution, high reproducibility, and operability. 【High Vacuum Measurement for Failure Analysis】 - Advanced StepScan automatic mechanism and laser alignment mechanism for high-speed scanning - Multi-sample chuck - Park's unique easy chip exchange function - Large vacuum chamber (300mm×420mm×320mm) - Direct optical microscope that enables ultra-long distance observation - Enhanced sensitivity high vacuum SSRM mode *For more details, please download the PDF or feel free to contact us.
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【Specifications (Scanner)】 ■XY Scanner: 50μm × 50μm (100μm × 100μm option) ■Z Scanner: 15μm *For more details, please download the PDF or feel free to contact us.
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Our company is a specialized manufacturer of nano-measurement instruments that develops, produces, and sells highly accurate and user-friendly Atomic Force Microscopes (AFM) using innovative technology and automation software. We have established a global sales network in over 30 countries, and our Atomic Force Microscopes are used in various fields around the world. As a rapidly growing AFM company with world-class technological capabilities, we are committed to developing core technologies and excellent product development, leading the advancement of nanotechnology.