MFC that makes everything possible
The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.
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basic information
**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - New process gases and/or ranges can be set in under 60 seconds - Supports unexpected replacement or upgrade of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*
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【Applications】 ■ Semiconductor etching tools ■ MOCVD ■ Gas flow control applications requiring high-purity all-metal flow paths *For more details, please download the PDF or feel free to contact us.
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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.
