Excellent reproducibility and linearity, allowing for a wide range of pressure measurements! It has outstanding features as a vacuum gauge.
The "M-311HG" is an ion gauge from the transducer vacuum gauge series. Ion gauges (thermal cathode ionization vacuum gauges) have excellent reproducibility and linearity, allowing for a wide range of pressure measurements, making them outstanding as vacuum gauges. The sensor uses a proven miniature gauge (MG-2I type). 【Features】 ■ Wide pressure measurement range ■ High response analog output ■ Four emission current setting modes ■ Space-saving and low power consumption ■ A product that considers safety and the environment, compliant with RoHS and CE marking *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Capable of measuring from 10^−7Pa to 10Pa, reaching low vacuum areas beyond the sputtering process without sacrificing characteristics on the ultra-high vacuum side. ■ The analog signal output of pressure values ensures a high response time of within 100 msec, making it suitable for process pressure control. ■ Options can be selected based on applications, such as improving filament lifespan when used in high-pressure areas. ■ Achieves a 40% reduction in space and power consumption by volume ratio (compared to the conventional model "M-310HG"). *For more details, please refer to the PDF materials or feel free to contact us.
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【Applications】 ■ Pressure measurement for production vacuum equipment ■ Pressure measurement for semiconductor sputtering equipment ■ Various vacuum devices *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.