A new sensory scope that vividly highlights and visualizes invisible, hard-to-see nanoscale defects.
- It is possible for anyone to easily and quantitatively inspect and evaluate defects inside and outside the wafer in a short time, even when visual inspection is difficult. - The collaboration of special optical technology and special image processing technology vividly highlights and visualizes defects. - Observation is possible at the nano level in depth (Z direction) and at the macro level in the field of view (XY direction). - Detection of scratches, cracks, dimples, watermarks, slips, saw marks, voids, foreign substances, etc. - Compatible with wafers ranging from Φ100mm to Φ300mm due to the automatic tiling stage.
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basic information
◇ Principle: Optical, Non-contact ◇ Observation time per screen: Approximately 10 seconds ◇ Product purpose: Defect visualization ◇ Display: Image display ◇ Operation: Simple ◇ Observation: Transmitted samples (internal, surface, back), reflected samples (surface) ◇ Field of view range: 34×28mm to 100×84mm ◇ Depth of field: Transmitted samples (approximately 300mm) ◇ Reflected samples: (approximately 1mm) ◇ Resolution: (X・Y) 150 nm and above ◇ Resolution: (Z) 5 nm and above ◇ Inspection items: Surface inspection, internal inspection ◇ Introduction: On-site inspection, quality, development, in combination with measuring instruments ◇ Environment: Normal ◇ Maintenance: Free ◇ Consumables: None
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Applications/Examples of results
◇ Incoming inspection of wafers such as Si, SiC, GaN, and GaAs. ◇ Inspection during the manufacturing process of semiconductor devices. ◇ Development of wafers such as Si, SiC, GaN, and GaAs.
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Company information
Our group is engaged in the manufacturing and sales of automotive-related products (piston rings, valve seats, and other automotive-related products) as well as marine and other products, along with related businesses. Our products are adopted in various types of engines, backed by reliable technology and a rich lineup of quality. In addition to automotive and marine products, we also handle MIM (Metal Injection Molding) parts that can achieve small and complex shapes, axial gap motors optimal for AGVs, motor cores (powdered magnetic cores), highly biocompatible titanium alloys (NiFreeT), and medical device components (dental implants).