Fully automatic batch processing equipment (substrate regeneration, etching, RCA cleaning, etc.)
High throughput, high reliability, low-cost batch processing equipment.
■ This is a cassette-type batch processing device. ■ Ideal for batch processing compatible with RCA processes such as APM/MS, SPM, HPM, and DHF. ■ Also supports substrate regeneration processes such as organic stripping and Poly-Si regeneration. ■ Proven capability for anisotropic etching such as MEMS. ■ Achievements up to 300mm. ■ Compatible with various drying units including S/D, IPA vapor drying, and hot water lift drying. ◎ The IPA vapor drying features a watermark suppression function. ■ For recent demands of "small quantity and diverse variety," we recommend the latest UDS spin processor as a spin single wafer. ◎ Throughput improvement is achieved by multi-chamber configuration of the UDS chamber. *For more details, please refer to the PDF document or feel free to contact us. Wafer, substrate cleaning equipment, semiconductor manufacturing equipment, semiconductor, resist stripping equipment, megasonic, low-cost, cleaning equipment, automatic cleaning machine, resist, batch cleaning equipment, silicon, etching equipment, RCA cleaning, insulating film, film formation, ceramic, loader unloader.
Inquire About This Product
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（2）
Download All Catalogs
Company information
* Under a team of experts well-versed in the manufacturing processes of various devices, we engage in consistent in-house activities that include the custom development, manufacturing, and sales of distinctive wet processing equipment tailored to meet the diverse needs of our clients, backed by years of accumulated know-how since our establishment, as well as after-sales support. * We manufacture and sell optimal system equipment while proposing processes that align with our clients' needs. * Our company is well-acquainted with various equipment forms such as batch (wet stations) and sheet (conveyor, spin), and we have numerous achievements; however, we particularly stand out with our Spin sheet-type equipment. * With the establishment of "patents" and "trademarks," we ensure that our products, such as the "Spin Dip Processor" and "UDS Processor," which possess a wide variety of unique features, cannot be easily replicated by others, attracting worldwide attention.