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  5. Other measurement, recording and measuring instruments
  6. High-precision non-contact thickness measurement device [for semiconductor wafers]

High-precision non-contact thickness measurement device [for semiconductor wafers]

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last updated:Mar 30, 2022

プレシテック・ジャパン
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Achieves high-resolution shape measurement. A wide variety of sensor probes are available. Inline measurement of flatness and thickness is also possible. Suitable for wafer inspection applications.

Our company handles non-contact type measuring instruments based on the principles of chromatic aberration confocal and interference. These instruments can be applied to film thickness measurement, shape measurement, roughness measurement, displacement measurement, and appearance inspection, allowing for in-process measurement during manufacturing, high-speed inline inspection, and offline measurement. We offer various interfaces to accommodate embedded applications. Measurements can be performed with high resolution (minimum XY resolution of 1μm and minimum Z resolution of 0.02μm), contributing to improved product quality and reductions in manufacturing process time and costs. 【Features】 ■ Wide range of sensor lineup Sensors can be selected according to inspection requirements and materials from various sensor probes. ■ Sensors according to measurement range Available in single-point sensors, line sensor types, and area scan types. ■ Applications Can be utilized for inspection of PCB flex, wire loop inspection, wafer bump inspection, and more. *For more details, please refer to the materials. Feel free to contact us with any inquiries.

    Other measurement, recording and measuring instruments
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High-precision non-contact thickness measurement device [for semiconductor wafers]

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【Examples of Use】 ■ Inspection of shape defects in fine structures (LED dots, ball grid arrays, connector appearance, chip/PCB flex warping) ■ Loop height inspection for wire bonding ■ Thickness measurement of thin and thick films (wafers, adhesives, coated films, resin coatings) *Thickness measurement from 2 to 10,500 μm is possible ■ Roughness measurement (wafer surfaces, metal surfaces) ■ Displacement measurement (trench depth, pattern height/width) *For more details, please refer to the materials. Feel free to contact us with any inquiries.

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[Keywords: Applications, Measurement Items, Benefits, etc.] Non-contact sensors, optical sensors, confocal, spectral interference method, thickness, thin films, thick films, height, shape, appearance, edges, slopes, measurement, inspection, high speed, 3D, line sensors, line scan, area scan, full surface, small, compact, inexpensive, high precision, inline, monitoring, in-situ, during processing, before and after processing, polishing, offline, standalone machines, tabletop machines, sampling, embedded, semiconductors, wafers, wafer bonding, Si wafers, Si, GaAs, InP, SiC, LiNbO3 (LN), LiTaO3 (LT), GaN, SiP, Al2O3 (sapphire), transparent, transparent bodies, black, glossy, mirror finish, easy.

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Quality Assurance through Pre-Technology Sensors in the Manufacturing Process

Quality Assurance through Pre-Technology Sensors in the Manufacturing Process

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Solutions for Semiconductor Pretech Products_20220628

Solutions for Semiconductor Pretech Products_20220628

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プレシテック・ジャパン

プレシテック・ジャパン

Testing, Analysis and Measurement

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Presitech is a specialist in laser material processing and optical measurement technology. We are not just a supplier of systems and components, but a professional partner in ensuring a smooth processing process for our customers. We offer consultations from the foundational stage and accurately consult with customers on their requests and objectives. We understand that the key to success in unique processing processes lies in the four components of exhibition, monitoring, processing, and control. Only by doing so can we provide appropriate solutions for our customers' applications. Our high-quality products, such as laser processing heads, quality monitoring systems, and optical measurement systems for spacing/thickness measurement, allow customers to directly benefit from our decades of experience. Our optical sensors are characterized by the highest precision and dynamic adaptability. Furthermore, they detect accurate values even in high-speed measurements.

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