Automatic defect inspection function, low noise, high throughput! Introducing an accurate atomic force microscope!
The "Park NX-Wafer" is an atomic force microscope that performs defect imaging and analysis fully automatically, improving productivity in defect inspection by 1,000% through AFM measurement techniques. It is a low-noise atomic force profiler for accurate and high-throughput CMP profile measurements. It measures sub-Å surface roughness with extreme accuracy, minimizing variation between chips. 【Features】 ■ Fully automated AFM solution for defect imaging and analysis ■ Up to 1,000% increase in productivity for defect review ■ Achieves accurate and high-throughput CMP measurements with a low-noise atomic force profiler ■ Extremely accurate sub-Å surface roughness measurement, minimizing variation between chip-to-chip ■ Atomic force profiler *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■System Specifications: Electric XY Stage ・200 mm: Drive 275 mm × 200 mm, Resolution 0.5 µm ・300 mm: Drive 375 mm × 300 mm, Resolution 0.5 µm ■XY Scanner Range: Single Module Flexure Type Closed Loop XY Scanner ・100 µm × 100 µm (Large Mode) ・50 µm × 50 µm (Medium Mode) ・10 µm × 10 µm (Small Mode) *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■ The only wafer inspection AFM equipped with an automatic defect review function. *For more details, please refer to the PDF document or feel free to contact us.
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Our company is a specialized manufacturer of nano-measurement instruments that develops, produces, and sells highly accurate and user-friendly Atomic Force Microscopes (AFM) using innovative technology and automation software. We have established a global sales network in over 30 countries, and our Atomic Force Microscopes are used in various fields around the world. As a rapidly growing AFM company with world-class technological capabilities, we are committed to developing core technologies and excellent product development, leading the advancement of nanotechnology.