Compatible with substrates up to 8 inches and supports semi-auto alignment exposure equipment.
The Zeiss Microtech MA/BA GEN4 is a semi-auto alignment exposure machine capable of handling substrates up to 8 inches square. It is equipped with optimal features for R&D and small-scale production applications in MEMS, optical components manufacturing, and compound semiconductors. The optimized alignment mark observation optical system and image processing capabilities enable precise alignment with minimal variation.
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basic information
- Supported substrate sizes MABA6: Small pieces to a maximum of φ150mm MABA8: Small pieces to a maximum of φ200mm *150×150, 200×200mm support is optional - Exposure modes Contact soft, hard, vacuum Proximity exposure gap: 1~300μm Optional flood exposure and split exposure - Exposure optical system Wavelength UV400 350~450nm UV300 280~350nm UV250 240~260nm Light source Mercury lamp 350W Mercury xenon lamp 500W UV-LED (compatible with i, h, g lines) In-plane illuminance uniformity: ±2.5% - Alignment method TSA alignment (surface alignment) BSA alignment IR alignment (optional) - Alignment modes Manual alignment Auto alignment (optional) DirectAlign (optional) - Optional features Objective lens for small substrates Infrared light alignment Bond alignment SMILE (wafer-level lens imprinting and stacking)
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Applications/Examples of results
MEMS Advanced Packaging 3D Packaging Compound Semiconductor Power Devices Solar Power Generation Nanotechnology Wafer-Level Optics
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Company information
Our company started in 1982 as a technical trading company specializing in the sales and maintenance services of semiconductor manufacturing equipment imported from overseas, as a group company of Kanematsu Corporation. Recently, in order to meet the diverse needs of our customers, we have been committed to ensuring that not only manufacturing equipment but also overseas products such as parts, materials, and subsystems can be used with confidence by our customers. While being a trading company, we have enhanced our technical department, which is responsible for planning, development, design, and manufacturing, to propose comprehensive technical solutions and expand our business globally to customers both domestically and internationally. In the future, we aim to continue being a company that provides new added value and services as an electronics technology trading company, growing together with our customers.