Introducing a MEMS sensor device for automobiles that requires the measurement of extremely small leak amounts!
In the rapidly changing environment surrounding automobiles, MEMS sensor devices for automotive electronics have become extremely important and are required to have high reliability. Even a slight gas intrusion (leak) into MEMS sensor devices (sealed devices) can lead to degradation and significantly compromise reliability. To ensure reliability, ultra-small leak measurements of 10^-15 Pa·m³/s (He) through destructive testing are required. [Commonly Used Automotive Electronics (Excerpt)] ■ Airflow Meter ■ Accelerator Sensor ■ Pressure Sensor ■ Steering Sensor ■ Millimeter-Wave Radar *For more details, please refer to the PDF materials or feel free to contact us.
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Other commonly used automotive electronics: - Steering torque sensor - O2 sensor - Wheel speed sensor - Infrared camera - Airbag sensor - Yaw rate sensor & acceleration sensor - Inter-vehicle distance control sensor *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.