Compatible with 150℃/200℃! A diaphragm vacuum gauge ideal for biopharmaceutical manufacturing.
The latest model provided by MKS, which has a long track record in high-temperature controlled vacuum gauges, features a compact integrated design and achieves low power consumption.
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basic information
150℃/200℃ compatible! The Baratron vacuum gauge is ideal for biopharmaceutical manufacturing and semiconductor manufacturing processes. The Baratron 631B is MKS's latest compact model, having supplied high-temperature controlled vacuum gauges for over 10 years. By maintaining high temperatures inside the sensor and preventing the deposition of process by-products onto the sensor, it reduces drift and achieves precise and long-term stable pressure measurements. The 631B, which allows for temperature control at either 150℃ or 200℃, is suitable not only as a vacuum gauge for semiconductor manufacturing processes under harsh conditions such as metal etching, nitride CVD, and ALD, but also for biopharmaceutical processes like freeze-drying and sterilization devices that use steam to prevent bacterial growth. Features: ● Minimum full-scale range: 133×10E-2Pa ● Maximum full-scale range: 133×10E5Pa ● Accuracy: 0.50% of reading ● Operates on ±15VDC input power only, low power consumption (maximum 1.0A) ● Built-in relay function adjustable from external (optional)
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Applications/Examples of results
- Applications as a vacuum gauge for semiconductor manufacturing processes under harsh conditions - Biopharmaceutical processes such as freeze-drying equipment and sterilization equipment that use steam to prevent bacterial growth
Company information
Our company is a global leading company that provides the latest technologies in manufacturing processes for growth industries, including thin film applications such as semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications such as medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the globe.
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